Ge nanocrystals embedded in ultrathin Si 3 N 4 multilayers with SiO 2 barriers
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science
Reference39 articles.
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Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Chemical depth profile of layered a-CSiO:H nanocomposites;Applied Surface Science;2018-10
2. Stress evolution of Ge nanocrystals in dielectric matrices;Nanotechnology;2018-03-08
3. SiGe layer thickness effect on the structural and optical properties of well-organized SiGe/SiO2multilayers;Nanotechnology;2017-07-24
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