Extension of the probe-tip error evaluation for areal surface roughness measurements using metrological AFM-Reference-Cited by-同舟云学术

Extension of the probe-tip error evaluation for areal surface roughness measurements using metrological AFM

Published:2021-12 Issue: Volume:18 Page:100092
ISSN:2665-9174
Container-title:Measurement: Sensors
language:en
Short-container-title:Measurement: Sensors

Author:

Misumi Ichiko,Kizu Ryosuke,Sugawara Kentaro,Hirai Akiko,Gonda Satoshi

Publisher

Elsevier BV

Subject

General Medicine

Reference21 articles.

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2. Geometrical product specifications (GPS)—surface texture: areal- Part 601: nominal characteristics of contact (stylus) instruments;ISO 25178-601,2010

3. Measurements of stylus radii;Vorburger;Wear,1979

4. Uncertainty analysis of roughness standard calibration using stylus instruments;Haitjema;Precision Eng,1998

5. Uncertainty of wavelength limitation due to stylus tip radius for engineering surface texture based on wavelength and amplitude by FFT;Yoshida;Wear,2006

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