Ferroelectric thin and thick films for microsystems-Reference-Cited by-同舟云学术

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Ferroelectric thin and thick films for microsystems

Published:2002-04 Issue:2-3 Volume:5 Page:65-76
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Whatmore R.W.,Zhang Q.,Huang Z.,Dorey R.A.

Funder

Royal Academy of Engineering

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference38 articles.

1. Bryzek J, Petersen K, McCulley W. Micromachines on the march. IEEE Spectrum, May 1994, 20–31.

2. Ferroelectrics, microsystems and nanotechnology;Whatmore;Ferroelectrics,1998

3. Pyroelectric materials and devices;Whatmore,2000

4. http://www.ifi.uio.no/∼sverre/nice.html.

5. Thin film bulk acoustic resonators and filters using ZnO and lead zirconuium titanate thin films;Su;IEEE Trans. MMT,2001

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