Subject
Mechanical Engineering,Mechanics of Materials,Acoustics and Ultrasonics,Condensed Matter Physics
Reference36 articles.
1. Modified Reynolds' equation and analytical analysis of perforated structures;Bao;Journal of Micromechanics and Microengineering,2003
2. Analytical solutions for the stiffness and damping coefficients of squeeze films in MEMS devices with perforated back plates;Mohite;Journal of Micromechanics and Microengineering,2005
3. Analytic damping model for an MEM perforation cell;Veijola;Microfluidics and Nanofluidics,2006
4. T. Veijola, Analytic damping model for a square perforation cell, Proceedings of the Ninth International Conference on Modeling and Simulation of Microsystems (MSM2006), Boston, 2006, pp. 554–557.
5. A comparative study of analytical squeeze film damping models in rigid perforated MEMS structures with experimental results;Pandey;Microfluidics Nanofluidics,2008
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