A mass spectrometry study of the gas pyrolysis of PH3 and a PH3/Si2H6 mixture
Author:
Publisher
Elsevier BV
Subject
Analytical Chemistry,Fuel Technology
Reference17 articles.
1. Phosphorus‐Doped Polycrystalline Silicon via LPCVD: I . Process Characterization
2. Hydrogenated Amorphous Silicon Produced by Pyrolysis of Disilane in a Hot Wall Reactor
3. Phosphorus-doped silicon films prepared by low pressure chemical vapour deposition of disilane and phosphine
4. Deposition of Phosphorus Doped Silicon Films by Thermal Decomposition of Disilane
5. Thermal dissociation of disilane: Quadrupole mass spectrometry investigation
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