Author:
Li Sikun,Wang Xiangzhao,Bu Yang
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference31 articles.
1. Resolution enhancement techniques in optical lithography;Wong;international society for optics and photonics (SPIE),2001
2. Illuminator modification of an optical aligner;Fehrs;In: Proceedings of the KTI Microelectronics Seminar,1987
3. Mack CA. Optimum stepper performance through image manipulation. In: Proceedings of the KTI Microelectronics Seminar, 1989; p. 209-216.
4. Illuminator design for the printing of regular contact patterns;Burkhardt;Microelectronic Engineering,1998
5. Source optimization for image fidelity and throughput;Granik;Journal of Microlithography, Microfabrication and Microsystems,2004
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37 articles.
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