Effects of depositing temperature on structural, optical and laser-induced damage properties of Ga2O3 films deposited by electronic beam evaporation

Author:

Yang Chen,Xu Junqi,Yan Lirong,Cai Changlong,Liu Weiguo

Funder

Scientific Research Programs

Shaaxi Provincial Education Department

Key Research and Development Plan

Shaanxi Provincial Science and Technology Department

Open Fund of Shaanxi Province Key Laboratory of Thin Films Technology and Optical Test

Xi'an Key Laboratory of Intelligent Detection and Perception

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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