Beam delivery system with a non-digitized diffractive beam splitter for laser-drilling of silicon
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Novel beam delivery system for microvia drilling using holographic and refractive optics;Lizotte;Proc SPIE,2003
2. Versatile light-control schemes based on diffractive optics for laser drilling, cutting, and joining technologies for microelectronic and micromechanical components and devices;Amako;Proc SPIE,2004
3. Industrial applications of ultrahigh precision short-pulse laser processing (Invited Paper);Liu;Proc SPIE,2005
4. Fan out diffractive beam splitter: 5 phase level binary versus 50 phase level grayscale;Lizotte;Proc SPIE,2006
5. Multi-spot laser processing of crystalline solar cells;Haupt;Proc SPIE,2011
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