Author:
Lim J.H.,Ratnam M.M.,Azid I.A.,Mutharasu D.
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference24 articles.
1. Optical deflection measurement for characterization of microelectromechanical system (MEMS);Firebaugh;IEEE Transactions on Instrumentation and Measurement,2004
2. Characterization of Young′s modulus of silicon versus temperature using a beam deflection method with a four-point bending fixture;Cho;Current Applied Physics,2009
3. Modeling, fabrication and characterization of a polymeric micromixer based on sequential segmentation;Nguyen;Biomed Microdevices,2006
4. A fully polymeric micro-pump with piezoelectric actuator;Nguyen;Sensors and Actuators B,2004
5. Sharpe WN, Yuan B, Vaidyanathan R. Measurement of Young′s modulus, poisson′s ratio and tensile strength of polysilicon, in: Proceeding of the Tenth IEEE International Workshop on Micro-electromechanical System, Nagoya, Japan: p. 424–9; 1997.
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