Characterization of Young’s modulus of silicon versus temperature using a “beam deflection” method with a four-point bending fixture-Reference-Cited by-同舟云学术

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Characterization of Young’s modulus of silicon versus temperature using a “beam deflection” method with a four-point bending fixture

Published:2009-03 Issue:2 Volume:9 Page:538-545
ISSN:1567-1739
Container-title:Current Applied Physics
language:en
Short-container-title:Current Applied Physics

Author:

Cho Chun-Hyung

Publisher

Elsevier BV

Subject

General Physics and Astronomy,General Materials Science

Reference14 articles.

1. Introduction to Microelectronic Fabrication;Jaeger,2002

2. Young's Modulus, Shear Modulus, and Poisson's Ratio in Silicon and Germanium

3. Y. Kang, Ph.D. Dissertation, (Auburn University, Auburn, AL, 1997), (Chap. 5, pp. 144–158).

4. Mechanics of Materials;Gere,2002

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