A novel optical diagnostic technique for analyzing the recrystallization characteristics of polycrystalline silicon thin films following frontside and backside excimer laser irradiation
Author:
Funder
National Science Council
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference28 articles.
1. An experimental approach to form selective single-crystalline silicon on nonalkaline glass using self-aligned heat reservoirs and continuous-wave green-laser lateral crystallization;Hara;Thin Solid Films,2008
2. Observation of explosive crystallization during excimer laser annealing using in situ time-resolved optical reflection and transmission measurements;Kuo;Journal of Materials Processing Technology,2009
3. Electrical properties of poly-Ge on glass substrate grown by two-step solid-phase crystallization;Toko;Solid-State Electronics,2009
4. Metal induced crystallization of amorphous silicon for photovoltaic solar cells;Van Gestel;Physics Procedia,2011
5. Characterization of high-performance polycrystalline silicon complementary metal–oxide–semiconductor circuits;Kawachi;Japanese Journal of Applied Physics,2007
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