High efficiency surface roughness measuring system for hard thin films deposited by cathodic arc evaporation-Reference-Cited by-同舟云学术

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High efficiency surface roughness measuring system for hard thin films deposited by cathodic arc evaporation

Published:2013-09 Issue:17 Volume:124 Page:2993-2997
ISSN:0030-4026
Container-title:Optik - International Journal for Light and Electron Optics
language:en
Short-container-title:Optik - International Journal for Light and Electron Optics

Author:

Kuo Chil-Chyuan,Siao Yu-Teng

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Wear behavior of DC unbalanced magnetron sputter deposited ZrCN films;Yao;Mater. Lett.,2005

2. Structure and properties of Zr/ZrCN coatings deposited by cathodic arc method;Braic;Mater. Chem. Phys.,2011

3. Characterization and antibacterial performance of ZrCN/amorphous carbon coatings deposited on titanium implants;Lai;Thin Solid Films,2011

4. Structure-property relations in ZrCN coatings for tribological applications;E Silva;Surf. Coat. Technol.,2010

5. Comparative study of surface roughness measured on polysilicon using spectroscopic ellipsometry and atomic force microscopy;Petrik;Thin Solid Films,1998

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