High resolution, low cost laser lithography using a Blu-ray optical head assembly-Reference-Cited by-同舟云学术

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High resolution, low cost laser lithography using a Blu-ray optical head assembly

Published:2012-06 Issue:6 Volume:50 Page:900-904
ISSN:0143-8166
Container-title:Optics and Lasers in Engineering
language:en
Short-container-title:Optics and Lasers in Engineering

Author:

Rothenbach Christian A.,Gupta Mool C.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Vacuum ultraviolet spectroscopy II;Samson,1998

2. Focused high energy proton beam micromachining: A perspective view

3. Blu-ray, Blu-ray Disc, 2010. Available at 〈http://www.blu-ray.com/faq/〉.

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