Focused high energy proton beam micromachining: A perspective view-Reference-Cited by-同舟云学术

Focused high energy proton beam micromachining: A perspective view

Published:1999-09 Issue:1-4 Volume:158 Page:165-172
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Watt Frank

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference21 articles.

1. M. Madou, Fundamentals of Microfabrication, CRC Press, Boca Raton, FL, 1997

2. P. Rai Choudury (Ed.), Handbook of Microlithography, Micromachining and Microfabrication, vol. 1, SPIE Press Monograph PM39, 1997

3. H.J. Levinson, W.H. Arnold, in: P. Rai Choudury (Ed.) Handbook of Microlithography, Micromachining and Microfabrication, vol. 1, Ch. 1, SPIE Press Monograph PM39, 1997, p. 11

4. F. Cerrina, in: P. Rai Choudury (Ed.), Handbook of Microlithography, Micromachining and Microfabrication, vol. 1, Ch. 3, SPIE Press Monograph PM39, 1997, p. 251

5. R.D. Allen, W.E. Conley, R.R. Kunz, in: P. Rai Choudury (Ed.), Handbook of Microlithography, Micromachining and Microfabrication, vol. 1, SPIE Press Monograph PM39, 1997, p. 321

Cited by 49 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Mask-Assisted Deposition of Ti on Cyclic Olefin Copolymer Foil by Pulsed Laser Deposition;Micromachines;2023-06-24

2. In-situ generation of Au nanoparticles in poly(methyl methacrylate) films via MeV proton irradiation;Materials Chemistry and Physics;2022-01

3. Physical and dosimetric characteristics of radiophotoluminescent glass from two-photon excitation microscopy;Radiation Measurements;2021-01

4. Application of micro- and nanoprobes to the analysis of small-sized 2D and 3D materials, nanocomposites, and nanoobjects;Handbook of Modern Coating Technologies;2021

5. Silver nanostructures embedding in polymethyl methacrylate patterns fabricated using proton beam writing;Surface and Interface Analysis;2020-02-24