Author:
Yang L.X.,Schuth M.,Thomas D.,Wang Y.H.,Voesing F.
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Digital laser micro-interferometer and its applications;Yang;Opt Eng,2003
2. The accuracy of fast 3D topography measurements;Ohlsson;Int J Mach Tool Manuf,2001
3. Microfabrication of microlens array by focused ion beam technology;Fu;Microelectron Eng,2000
4. Laboratory test of a pyramid wavefront sensor;Esposito;Proc SPIE,2000
5. Harder TA, Yao Tze-Jung, He Qing, Shih Chi-Yuan, Tai Yu-Chong. Residual stress in thin-film parylene-c. Micro Electro Mechanical Systems. In: Proceedings of the 15th IEEE conference, 2002, p. 435–38.
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