Stealth dicing of sapphire sheets with low surface roughness, zero kerf width, debris/crack-free and zero taper using a femtosecond Bessel beam
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference33 articles.
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4. Stealth dicing of sapphire wafers with near infra-red femtosecond pulses;Yadav;Appl. Phys. A,2017
5. K. Itaya, M. Onomura, J. Nishio, L. Sugiura, S. Saito, M. Suzuki, J. Rennie, S-Y. Nunoue, M. Yamamoto, H. Fujimoto, Y. Kokubun, Y. Ohba, G-I. Hatakoshi, M. Ishikawa Room Temperature Pulsed Operation of Nitride Based Multi-Quantum-Well Laser Diodes with Cleaved Facets on Conventional C-Face Sapphire Substrates Jpn. J. Appl. Phys. 35 (1996) L1315–7.
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