Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference33 articles.
1. Spectroscopic ellipsometry: principles and applications;Fujiwara,2007
2. Industrial applications of spectroscopic ellipsometry;Tompkins;Thin Solid Film,2004
3. Spectroscopic ellipsometry for inline process control in the semiconductor industry;Zollner,2013
4. In-situ ellipsometric study of the optical properties of LTL-doped thin film sensors for copper(II) ion detection;Cody;Coatings,2020
5. Spectroscopic ellipsometry characterization of multilayer optical coatings;Hilfiker;Surface Coat Technol,2019