Author:
Chen Lei,Wang Zongshen,Gao Shan,Zhu Lihua,Yu Wenhui,Zheng Hongyu
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference45 articles.
1. Application of micro-electro-mechanical systems (MEMS) as sensors: a review;Faudzi;J. Robot. Mechatron.,2020
2. H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida, Detection of kinetic heartbeat signals from airflow at mouth by catheter flow sensor with temperature compensation, in: IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China: IEEE;2016,359–362.
3. Pressure sensor: state of the art, design, and application for robotic hand;Almassri;J. Sensors,2015
4. A survey of mechanical failure and design for reliability of MEMS;Somà;IOP Conf. Ser.: Mater. Sci. Eng.,2020
5. Investigation of high cyclic fatigue behaviour of thin copper films using MEMS structure;Saghaeian;Int. J. Fatigue,2019
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