High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving-Reference-Cited by-同舟云学术

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High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving

Published:2022-11 Issue: Volume:158 Page:107167
ISSN:0143-8166
Container-title:Optics and Lasers in Engineering
language:en
Short-container-title:Optics and Lasers in Engineering

Author:

Yin Yunfei,Liu Zhaowu,Jiang Shan,Wang Wei,Yu Hongzhu,Jiri Galantu,Hao Qun,Li Wenhao

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. Polarization-modulated grating interferometer by conical diffraction;Liu;J Optics Express.,2022

2. Fast method to detect and calculate displacement errors in a Littrow grating-based interferometer;Lv;J Appl Optics.,2019

3. Measurement technologies for precision positioning;Gao;J CIRP Ann Manuf Technol,2015

4. Towards ultimate optical lithography with NXT:1950i dual stage immersion platform;Tom;J Proceedings of SPIE.,2010

5. Overview of 2D grating displacement measurement technology;Yin;J Chinese Optics,2020

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1. Bidirectional Littrow double grating interferometry for quadruple optical interpolation;Optics & Laser Technology;2024-08

2. Polarization beam splitter based on 2D transmissive grating;Optics Express;2024-05-20

3. Research on Dual-Grating Spacing Calibration Method Based on Multiple Improved Complete Ensemble Empirical Mode Decomposition with Adaptive Noise Combined with Hilbert Transform;Photonics;2024-05-10

4. Bidirectional two-degree-of-freedom grating interferometer with biased Littrow configuration;Optics Communications;2024-04

5. Real-Time Direction Judgment System for Dual-Frequency Laser Interferometer;Sensors;2024-03-22

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