Overview of 2D grating displacement measurement technology-Reference-Cited by-同舟云学术

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Overview of 2D grating displacement measurement technology

Published:2020 Issue:6 Volume:13 Page:1224-1238
ISSN:2095-1531
Container-title:Chinese Optics
language:en
Short-container-title:

Author:

Yun-Fei YIN, , ,Zhao-Wu LIU,JIRIGALANTU ,Hong-Zhu YU,Wei WANG,Xiao-Tian LI,He BAO,Wen-Hao LI,Qun HAO, , , ,

Publisher

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Subject

Atomic and Molecular Physics, and Optics

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 基于叠栅条纹投影成像的差动式光栅位移测量系统;Acta Optica Sinica;2024

2. Three-Degree-of-Freedom Absolute Displacement Sensor Based on Planar Magnetic Grid;2023 IEEE 16th International Conference on Electronic Measurement & Instruments (ICEMI);2023-08-09

3. Modeling and test of an absolute four-degree-of-freedom (DOF) grating encoder;Optical Metrology and Inspection for Industrial Applications IX;2022-12-19

4. An Ultra-Precision Absolute-Type Multi-Degree-of-Freedom Grating Encoder;Sensors;2022-11-22

5. High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving;Optics and Lasers in Engineering;2022-11

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