A Fizeau interferometry stitching system to characterize X-ray mirrors with sub-nanometre errors

Author:

da Silva Murilo B.ORCID,Alcock Simon G.ORCID,Nistea Ioana-Theodora,Sawhney Kawal

Funder

CALIPSOplus

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference44 articles.

1. Diamond Light Source website, https://www.diamond.ac.uk/Home.html; 2022 [accessed 25 July 2022].

2. Wave-optical analysis of submicron focus of hard x-ray beams by reflective optics;Yamauchi,2002

3. Ion beam figuring surface finishing of X-ray and synchrotron beam line optics using stitching interferometry for the surface topology measurement;Hänsel,2015

4. Development of a numerically controlled elastic emission machining system for fabricating mandrels of ellipsoidal focusing mirrors used in soft x-ray microscopy;Takei,2013

5. Ion beam figuring and optical metrology system for synchrotron x-ray mirrors;Hand,2019

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