Interactions between RuO2 and PZT material

Author:

Benc̆an Andreja,Hrovat Marko,Holc Janez,Kosec Marija

Publisher

Elsevier BV

Subject

Materials Chemistry,Ceramics and Composites

Reference12 articles.

1. Fatigue of ferroelectric PbZr1–xTixO3 capacitors with Ru and RuOx electrodes;Bernstein;J. Mater. Res.,1993

2. Effect of RuO2 growth temperature on ferroelectric properties of RuO2/Pb(Zr,Ti)O3/RuO2/Pt capacitors;Norga;Appl. Phys. Lett.,2000

3. The effect of RuO2/Pt hybrid bottom electrode structure on the leakage and fatigue properties of chemical solution derived Pb(ZrxTi1–x)O3 thin films;Kim;J. Mater. Res.,1999

4. Morten, B., De Cicco, G. and Prudenziati, M., Piezoelectric properties of PZT thick films. In Proc. 7th European Hybrid Microelectronics Conf. ISHM-Europe 89, Hamburg, May 1989, p. 8.4.

5. Processing and microstructure of porous and dense thick films on Al2O3;Fernandez;J. Mater. Sci.,1995

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