Thin film piezoelectric property considerations for surface acoustic wave and thin film bulk acoustic resonators
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Ceramics and Composites
Reference9 articles.
1. Reduction of residual stress for ZnO/Al thin films on glass substrate prepared by radio frequency magnetron sputtering;Sakaguchi;Vacuum,1998
2. The fabrication of thin-film bulk acoustic wave resonators employing a ZnO/Si composite diaphragm structure using porous silicon layer etching;Sang-Ho;IEEE Electron Device Letters,1999
3. Passive remote sensing for temperature and pressure using SAW resonator devices;Buff;IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control,1998
4. Structure and morphology of high quality indium-doped ZnO films obtained by spray pyrolisis;Miki-Yoshida;Thin Solid Film,2000
5. Structural, optical and surface acoustic wave properties of epitaxial ZnO fioms grown on (0112) sapphire by metalorganic chemical vapour deposition;Gorla;Journal of Applied Physics,1999
Cited by 19 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. ZnO Nanorods Morphology Control in Hydrothermal Method and their Humidity Sensing Enhancement on AlN SAW Device;2023 IEEE 23rd International Conference on Nanotechnology (NANO);2023-07-02
2. Investigation of optical properties of zinc oxide nanofilms deposited by electrodeposition technique;Optical Engineering;2023-01-17
3. Improved frequency response of the 3.5 GHz SMR devices using Ga-doped AlN thin films as the piezoelectric layers;Modern Physics Letters B;2022-08-20
4. Structure-Size Optimization and Fabrication of 3.7 GHz Film Bulk Acoustic Resonator Based on AlN Thin Film;Frontiers in Materials;2021-10-20
5. Fabrication of a 3.5-GHz Solidly Mounted Resonator by Using an AlScN Piezoelectric Thin Film;Coatings;2021-09-23
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3