Direct evidence for β-hydride elimination on Si (100)
Author:
Publisher
Elsevier BV
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Reference35 articles.
1. Atomic layer epitaxy
2. Mechanisms and kinetics of Si atomic‐layer epitaxy on Si(001)2×1 from Si2H6
3. Molecular layer epitaxy of silicon
4. Self-Limiting Adsorption of SiCl2H2and Its Application to the Layer-by-Layer Photochemical Process
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