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Numerical Research on Flow Characteristics of Vortex Stage in Dry High Vacuum Pump

  • Published:2012 Issue: Volume:32 Page:127-134
  • ISSN:1875-3892
  • Container-title:Physics Procedia
  • language:en
  • Short-container-title:Physics Procedia

Author:

Liu Kun,Gu Xiao-guang,Ba De-chun,Li Pei-yin,Du Guang-yu,Yue Xiang-ji,Yang Naiheng

Publisher

Elsevier BV

Subject

General Engineering

Reference9 articles.

1. A.D. Chew, M. Galtry, R.G. Livesey, I. Stones. J. Vac. Sci. Technol. A23(5). 2005.9.p.1314-1318.

2. M. Bijker, C.M. Rippl, F. Semiconductor Fab. Tech. 27th Edition. 2006.10.

3. The BOC Group. BOC Edwards Porduct Catalog 2007. 2007.1.

4. The Preiffer Vacuum Gmbh. Preiffer Vacuum Product Booklet. 2007.1.

5. N. H. Yang. Vacuum Equipment. Bei Jing: Metallurgy Industry Press. 2001.9.

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