Prospects for Developing Modern High-Vacuum Mechanical Pumps

Author:

Ochkov A.A.1

Affiliation:

1. Bauman Moscow State Technical University

Abstract

High-vacuum mechanical pumps are widely used in various fields of science and technology for research and industrial applications. Modern high-vacuum mechanical pumps include molecular vacuum pumps, turbomolecular vacuum pumps and hybrid turbomolecular vacuum pumps, i.e., designs that represent a turbomolecular vacuum pump with one or more additional molecular stages. There are also a number of experimental and theoretical developments that propose combinations of different types of high-vacuum pumps in which, as a rule, on the suction side the main pumping is carried out by an axial turbomolecular stage. These schemes belong to the class of modern high-vacuum mechanical pumps. The paper examines the designs and analyzes scientific studies of modern high-vacuum mechanical pumps. Relying on this overview, we found the unsolved problems of designing and mathematical modeling of high-vacuum mechanical pumps working processes, which could give further prospects for vacuum technology development

Funder

Russian Foundation for Basic Research

Publisher

Bauman Moscow State Technical University

Subject

Applied Mathematics,General Mathematics

Reference47 articles.

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5. Compact molecular-drag vacuum pump. Patent US 7165931. Appl. 03.01.2005, publ. 02.06.2005.

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