Diverse Amorphous Carbonaceous Thin Films Obtained by Plasma Enhanced Chemical Vapor Deposition and Plasma Immersion Ion Implantation and Deposition
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference31 articles.
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3. Relationships between the plasma environment and the composition and optical properties of plasma‐polymerized thin films produced in rf discharges of C2H2‐SF6mixtures
4. Fluorinated polymer films from r.f. plasmas containing benzene and sulfur hexafluorine
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