Researching of Dielectric Membrane Films Obtained by Reactive Magnetron Sputtering-Reference-Cited by-同舟云学术

Researching of Dielectric Membrane Films Obtained by Reactive Magnetron Sputtering

Published:2015 Issue: Volume:72 Page:495-499
ISSN:1875-3892
Container-title:Physics Procedia
language:en
Short-container-title:Physics Procedia

Author:

Veselov D.S.,Voronov Yu.A.,Vanyukhin K.D.

Publisher

Elsevier BV

Subject

General Engineering

Reference18 articles.

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5. Bubnov, Yu., Golikov, A., Kazak, A., 2008. Semiconductor gas sensors and gas analysis instruments based on them. Journal of Electronics: Science, Technology, Business, Special Issue: 72-76.

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