Abatement of fluorinated compounds using a 2.45GHz microwave plasma torch with a reverse vortex plasma reactor-Reference-Cited by-同舟云学术

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Abatement of fluorinated compounds using a 2.45GHz microwave plasma torch with a reverse vortex plasma reactor

Published:2015-08 Issue: Volume:294 Page:41-46
ISSN:0304-3894
Container-title:Journal of Hazardous Materials
language:en
Short-container-title:Journal of Hazardous Materials

Author:

Kim J.H.,Cho C.H.,Shin D.H.,Hong Y.C.,Shin Y.W.

Funder

Government funds

Degree & Research Center Program of the Korea Research Council of Fundamental Science and Technology

Publisher

Elsevier BV

Subject

Health, Toxicology and Mutagenesis,Pollution,Waste Management and Disposal,Environmental Chemistry,Environmental Engineering

Reference18 articles.

1. SF6 usage and emission trends in the TFT-LCD industry

2. Abatement of PFCs from Semiconductor Manufacturing Processes by Nonthermal Plasma Technologies: A Critical Review

3. Abatement of perfluorocarbons with combined plasma catalysis in atmospheric-pressure environment

4. L. Beu, P.T. Brown. Proceedings of the IEEE/CPMT International Electronic Manufacturing Technology Symposium, 1998, 277.

5. Efficient Destruction of CF4 through In Situ Generation of Alkali Metals from Heated Alkali Halide Reducing Mixtures

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