Thickness vibration of piezoelectric plates of 6mm crystals with tilted six-fold axis and two-layered thick electrodes

Author:

Du Jianke,Xian Kai,Wang Ji,Yang Jiashi

Publisher

Elsevier BV

Subject

Acoustics and Ultrasonics

Reference7 articles.

1. Micromachined acoustic wave resonator isolated from substrate;Pang;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,2005

2. Solidly mounted ZnO shear mode film bulk acoustic wave resonators for sensing applications in liquids;Link;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,2006

3. Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators;Martin;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,2006

4. Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axis lie in the substrate plane;Yanagitani;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,2007

5. H.F. Zhang, J.A. Turner, J.A. Kosinski, Analysis of thickness vibrations of c-axis inclined aluminum–nitrogen thin film resonators, in preparation.

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