An Approximation for Rapid Simulation of Thin-Film Bulk Acoustic Resonators (FBARs) with Sandwich-Layered Structure
Author:
Funder
National Natural Science Foundation of China
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Computational Mechanics
Link
https://link.springer.com/content/pdf/10.1007/s10338-022-00374-9.pdf
Reference21 articles.
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2. Jamneala T, Kirkendall C, Ivira B, Thalhammer RK, Bradley P, Ruby R. The main lateral mode approximation of a film bulk acoustic resonator with perfect metal electrodes. IEEE Trans Ultrason Ferroelectr Freq Control. 2018;65(9):1703–16.
3. Qin L, Chen Q, Cheng H, Wang QM. Analytical study of dual mode thin film bulk acoustic resonators (FBARs) based on ZnO and AlN films with tilted c-axis orientation. IEEE Trans Ultrason Ferroelectr Freq Control. 2010;57(8):1840–53.
4. Yanagitani Y, Morisato N, Takayanagi S, Matsukawa M, Watanabe Y. C-Axis Zig-Zag ZnO film ultrasonic transducers for designing longitudinal and shear wave resonant frequencies and modes. IEEE Trans Ultrason Ferroelectr Freq Control. 2011;58(5):1062–8.
5. Piazza G, Stephanou PJ, Pisano AP. Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators. J Microelectromech Syst. 2006;15(6):1406–18.
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