Author:
Lee C.K.,Cochran S.,Abrar A.,Kirk K.J.,Placido F.
Subject
Acoustics and Ultrasonics
Reference15 articles.
1. C-axis oriented AlN films prepared on diamond film substrate by electron cyclotron resonance plasma-enhanced chemical vapour deposition;Gong;J. Crystal Growth,2000
2. Rf-sputtered aluminium nitride films on sapphire;Shuskus;Appl. Phys. Lett.,1974
3. Aluminium nitride thin films prepared by radical-assisted pulsed laser deposition;Ishihara;Vacuum,2000
4. Chemical etching of ion beam deposited AlN and AlN:H;Huang;Thin Solid Films,1996
5. C.K. Lee, F. Placido, S. Cochran, K.J. Kirk, Growth of sputtered AlN thin film on glass in room temperature, in: Proceedings of the 2002 IEEE Ultrasonics Symposium, Munich, 2002, pp. 1090–1093
Cited by
22 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献