Author:
Wei Yangjie,Herzog Thomas,Heuer Henning
Subject
Acoustics and Ultrasonics
Reference12 articles.
1. Measurement of the bulk, C-axis electromechanical coupling constant as a function of AlN films quality;Naik;IEEE Transactions on Ultrasonic, Frequencies and Frequency Control,2000
2. Piezoelectric, dielectric, and interfacial properties of aluminum nitride films;Liu;Journal of Vacuum Science & Technology A,1998
3. High frequency, high temperature ultrasonic transducer;Pate;NDT International,1990
4. Piezoelectric, dielectric, and interfacial properties of aluminum nitrides films;Fu;Journal of Vacuum Science and Technology A,1998
5. Thick aluminum nitride films deposited by room-temperature sputtering for ultrasonic applications;Lee;Ultrasonics,2004
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