Capacitive micromachined ultrasonic transducers based on annular cell geometry for air-coupled applications

Author:

Na Shuai,Chen Albert I.H.,Wong Lawrence L.P.,Li Zhenhao,Macecek Mirek,Yeow John T.W.

Funder

Natural Sciences and Engineering Research Council of Canada

CMC Microsystems

Techno Scientific Inc

Publisher

Elsevier BV

Subject

Acoustics and Ultrasonics

Reference30 articles.

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5. N.J. Friberg, C.A. Boulos, Ultrasonic vehicle positioning apparatus and method, U.S. Patent. No. 5208586, 1993.

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