Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,General Computer Science,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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1. The Structural and Electrical Properties of High-K Hf-Sm-O Thin Films Prepared by Atomic Layer Deposition;2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM);2023-06-29