Study of Deposition Temperature Effect on Defect Density in ZrN Thin Films by Positron Annihilation
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Published:2014
Issue:
Volume:75
Page:34-38
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ISSN:1877-7058
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Container-title:Procedia Engineering
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language:en
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Short-container-title:Procedia Engineering
Author:
Saleh Abdulnasser S.
Subject
Applied Mathematics
Reference11 articles.
1. A .J. Perry, J.P. Schaffer, J. Brunner, W.D. Sproul. 1991. A study of the picostructure of sputtered ZrN films. Surface and Coatings Technology, Volume 49, 1-3,, PP188. 2. H. Jiménez, E. Restrepo, A. Devia, 2006, Effect of the substrate temperature in ZrN coatings grown by the pulsed arc technique studied by XRD, Surface and Coatings Technology, 201, PP 1594. 3. D.-J. Kim, Y.-M. Yu, S.-H. Eom, T.-H. Kim, C.-S. Go, Y.D. Choi, 2005, Effect of substrate temperature on the phase change of Zn0.40Mn0.60Se thin films Materials Chemistry and Physics, 92, PP 274. 4. Daiane Roman, Juliane Bernardi, Cintia L.G. de Amorim, Fernando S. de Souza, Almir Spinelli, Cristiano Giacomelli, Carlos A. Figueroa, Israel J.R. Baumvol, Rodrigo L.O. Basso, 2011, Effect of deposition temperature on microstructure and corrosion resistance of ZrN thin films deposited by DC reactive magnetron sputtering Materials Chemistry and Physics, 130, PP. 147. 5. Jiwoong Kim, Shinhoo Kang, 2012, First principles investigation of temperature and pressure dependent elastic properties of ZrC and ZrN using Debye–Gruneisen theory Journal of Alloys and Compounds, 540, PP 94.
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