Fabrication of AlN slender piezoelectric cantilevers for highspeed MEMS actuations
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics
Reference8 articles.
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4. Joseph C Doll, Bryan C Petzold, Biju Ninan, Ravi Mullapudi and Beth L. Pruitt. Aluminum nitride on titanium for CMOS compatible piezoelectric transducers. J. Micromech. Microeng. 2010; 20: 025008.
5. U Sokmen et al. Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications. J. Micromech. Microeng.2010; 20: 064007.
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