Author:
Tsai Ming-Han,Liu Yu-Chia,Sun Chih-Ming,Wang Chuanwei,Fang Weileun
Reference5 articles.
1. A Monolithic 3D Fully-differential CMOS Accelerometer;Tsai;IEEE NEMS’08,2008
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3. A differential capacitive three-axis SOI accelerometer using vertical comb electrodes;Hamaguchi;IEEE Transducers’07,2007
4. A monolithic CMOS-MEMS 3-Axis accelerometer with a low-noise, Low-Power dual-chopper amplifier;Qu;IEEE Sensors journal,2008
5. Design and application of a metal wet-etching post process for the improvement of CMOS-MEMS capacitive sensors;Tsai;Journal of Micromech. and Microeng.,2009
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