Micro Pirani vacuum gauges manufactured by a film transfer process

Author:

Schelcher G.,Lefeuvre E.,Brault S.,Parrain F.,Martincic E.,Dufour-Gergam E.,Bosseboeuf A.

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference8 articles.

1. Fabrication of Cantilevers by two-Step Transfer Process without lithography;Kawata;Jap. J. Appl. Phys.,2009

2. Temperature-controlled transfer and self-wiring for multi-color light-emitting diode arrays;Onoe;J. Micromech. Microeng.,2009

3. Fabrication of lab-on-chip devices from fluoropolymers;Taberham;J. Micromech. Microeng.,2008

4. Mechanical and electrical characterization of BCB as a bond and seal material for cavities housing (RF-) MEMS devices;Jourdain;J. Micromech. Microeng.,2005

5. MEMS packaging process by film transfer using an anti-adhesive layer;Brault;Microsyst. Technol.,2010

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Overview of the MEMS Pirani Sensors;Micromachines;2022-06-14

2. MEMS Process by Film Transfer Using a Fluorocarbon Anti-Adhesive Layer;Journal of The Electrochemical Society;2011

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