Influence of seed layer on crystallinity and orientation of pulsed — DC sputtered AlN thin-films for piezoelectric actuators
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics
Reference9 articles.
1. Piezoelectric aluminum nitride nanoelectromechanical actuators;Sinha;Appl. Phys. Lett.,2009
2. Electrical detection of the mechanical resonances in AlN-actuated microbridges for mass sensing applications;González-Castilla;Appl. Phys. Lett.,2008
3. Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films;Karabalin;Appl. Phys. Lett.,2009
4. Defect and stress characterization of AlN films by Raman spectroscopy;Lughi;Appl. Phys. Lett.,2006
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3. Indium hexagonal island as seed-layer to boost a-axis orientation of AlN thin films;Superlattices and Microstructures;2018-06
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