Author:
Shishova M.V.,Odinokov S.B.,Lushnikov D.S.,Zherdev A.Y.,Gurylev O.A.
Reference17 articles.
1. Linear optical encoder system with sinusoidal signal distortion below −60 dB;Rozman;IEEE Trans. on Instr. and Measurem,2010
2. Technology and applications of grating interferometers in high-prescision measurement;Teimel;Precis. Engeneering,1992
3. Analysis of signal distortion caused by opening ratio variation of main scale and index scale in linear encoder;Li;Adv. Materials Research,2013
4. S. Fan,Y. Shi, L. Yin, L. Feng, and H. Liu, A study on the fabrication of main scale of linear encoder using continuous roller imprint method, SPIE Proc. 3W (2013).
5. A heterodyne interferometer with periodic nonlinearities smaller than ±10 pm;Weichert;Meas. Sci. Technol,2012
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