Elaboration of a Novel Design Pirani Pressure Sensor for High Dynamic Range Operation and Fast Response Time
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics
Reference9 articles.
1. Double-beam integrated thermal vacuum sensor;van Herwaarden;J. Vacuum Sci. Technol. A,1987
2. A microfabricated Pirani pressure sensor operating near atmospheric pressure;Doms;J. Micromech. Microeng.,2005
3. An improved performance poly-Si Pirani vacuum gauge using heat-distributing structural supports;Mitchell;J. Microelectromech. Syst.,2008
4. An analytical model and verification for MEMS Pirani gauges;Santagata;J. Micromech. Microeng.,2011
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A CMOS Compatible Micro Pirani Gauge with Structure Optimization for Performance Enhancement;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
2. Overview of the MEMS Pirani Sensors;Micromachines;2022-06-14
3. High Resolution Nano-gap Pirani Sensor for Pressure Measurement in Wide Dynamic Range Operation Around Atmospheric Pressure;Procedia Engineering;2016
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