Design of Phononic Crystal Tethers for Frequency-selective Quality Factor Enhancement in AlN Piezoelectric-on-silicon Resonators

Author:

Zhu Haoshen,Lee Joshua E.-Y.

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference6 articles.

1. Piezoelectric-on-silicon lateral bulk acoustic wave micromechanical resonators;Ho;J. Microelectromech. Syst.,2008

2. L. Sorenson, et al., One-dimensional linear acoustic bandgap structures for performance enhancement of AlN-on-Si micromechanical resonators, in Digest Tech. Papers Transducers‘11 Conf., pp. 918-921.

3. R. Abdolvand, et al., Single-resonator dual-frequency thin-film piezoelectric-on-substrate oscillator, in Tech. Dig. IEEE IEDM 2007, pp. 419-422.

4. Anchor loss reduction in AlN Lamb wave resonators using phononic crystal strip tethers, in Proc;Lin;IEEE IFCS,2014

5. GaN MEMS resonator using a folded phononic crystal structure, in Tech;Wang;Dig. Hilton Head,2014

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