Young's Modulus of Nano Polycrystalline Silicon Film

Author:

Lu X.B.,Cui L.H.,Ren M.Y.

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference12 articles.

1. Zeng Wen, Liu Tian-mo. Nano SnO2 based gas sensor for formaldehyde gas detection. Nanotechnology and precision engineering, 2009; 7(5): 387-391.

2. ZhuJing. Nano Materials and Devices. 1st. ed. Beijing: Tsinghua University Press; 2003.

3. Influence of doping level on the gauge factor of polysilicon nano-film;Chuai Rong-yan;Chinese Journal of Semiconductors,2006

4. Extracting hardness-displacement relations and elastic modulus using nanoindentation loading curves;Tan;ACTA Metallurgica Sinica,2005

5. Analysis of tunneling piezoresistive effect of p-type polysilicon nanofiilms;Lu Xue-bin;Advanced Materials Research,2009

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