High-Frequency Mechanical Excitation of a Silicon Nanostring with Piezoelectric Aluminum Nitride Layers
Author:
Funder
FET-Open PHENOMEN project
Ramn y Cajal postdoctoral fellowship
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevApplied.14.014054/fulltext
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1. Zeptogram-Scale Nanomechanical Mass Sensing
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