Design, Fabrication and Characterization of a Tactile Display Based on AlN Transducers-Reference-Cited by-同舟云学术

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Design, Fabrication and Characterization of a Tactile Display Based on AlN Transducers

Published:2014 Issue: Volume:87 Page:1310-1313
ISSN:1877-7058
Container-title:Procedia Engineering
language:en
Short-container-title:Procedia Engineering

Author:

Bernard F.,Gorisse M.,Casset F.,Chappaz C.,Basrour S.

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference7 articles.

1. Squeeze film effect for the design of an ultrasonic tactile plate, IEEE transactions on ultrasonics;Biet;Ferroelectrics and Frequency control,2007

2. Surface micromachined BAW resonators based on AlN;Lanz;IEEE Ultrasonics symposium,2002

3. Dielectrical properties of Metal-Insulator-Metal Aluminium Nitride structures: measurement and modeling;Ben Hassine;J. Appl. Phys.,2009

4. Lamb mode reflections at the end of a plate loaded by a viscoelastic material;Wilkie-Chancelier;IEEE International Ultrasonics Symposium (Ultrasonics),2006

5. Low voltage actuated plate for haptic applications with PZT thin-film;Casset,2013

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Crystallization of piezoceramic films on glass via flash lamp annealing;Nature Communications;2024-02-29

2. Anisotropic piezoelectric response of ion beam sputtered aluminum nitride thin films textured along [101¯0]-axis: A field dependent X-ray diffraction investigation;Applied Surface Science;2018-09

3. Transparent Ferroelectric Capacitors on Glass;Micromachines;2017-10-20

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