Anisotropic piezoelectric response of ion beam sputtered aluminum nitride thin films textured along [101¯0]-axis: A field dependent X-ray diffraction investigation
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
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5. H. Morkoç, Handbook of Nitride Semiconductors and Devices, Materials Properties, Physics and Growth, Wiley, 2009
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