RF Sputtering of ZnO (002) Thin Films on Top of 3C-SiC-on-Si (100) Substrates for Low Cost Piezoelectric Devices
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics
Reference9 articles.
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1. Ni Nanoparticles Supported on High Surface Area Carborundum for Enhanced Hydrogen Production by Ammonia Decomposition;ACS Applied Nano Materials;2023-05-26
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3. SAW propagation characteristics of TeO3/3C-SiC/LiNbO3layered structure;Materials Research Express;2018-04-27
4. RF Sputtering, Post-Annealing Treatment and Characterizations of ZnO (002) Thin Films on 3C-SiC (111)/Si (111) Substrates;Micromachines;2017-05-07
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