Annealing temperature-dependent structural and electrical properties of (Ta2O5)1-x - (TiO2)x thin films, x ≤ 0.11
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference35 articles.
1. Rutile-type TiO2 thin film for high-k gate insulator;Kadoshima;Thin Solid Films,2003
2. Electrical properties of thin film zirconia grown by ultraviolet ozone oxidation;Ramanathan;J. Appl. Phys.,2002
3. Physical and electrical characterization of hafnium oxide and hafnium silicate sputtered films;Callegari;J. Appl. Phys.,2001
4. Intermixing at the tantalum oxide/silicon interface in gate dielectric structures;Alers;Appl. Phys. Lett.,1998
5. UV-O3 and dry-O2: two-step annealed chemical vapor- deposited Ta2O5 films for storage dielectrics of 64-Mb DRAM's;Shinriki;IEEE Trans. Electron. Dev.,1991
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Improvement in structural and dielectric properties of sputtered Ta2O5 thin film by post-deposition annealing;Applied Physics A;2024-09-10
2. Exploration of structural and dielectric properties of orthorhombic Ta2O5 nanoplatelets towards the potential optoelectronic devices;Materials Today Communications;2024-03
3. Enhanced self-driven ultraviolet photodetection performance of high-k Ta2O5/GaN heterostructure;Materials Science in Semiconductor Processing;2024-02
4. Annealing Temperature-Dependent Structural, Optical, and Electrical Properties of [(Ba1−zCaz)(Zr0.1Ti0.9)O3], (z = 0.155), Films;ECS Journal of Solid State Science and Technology;2023-02-01
5. Study on Structural and Optical Properties of Ta2O5 Nanocluster;Springer Proceedings in Materials;2023
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3