Two-step sintering of aluminum-doped zinc oxide sputtering target by using a submicrometer zinc oxide powder
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials
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4. Highly conductive alumina-added ZnO ceramic target prepared by reduction sintering and its effect on the properties of deposited thin films by direct current magnetron sputtering;Huang;Thin Solid Films,2010
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1. Effects of Al2O3 doping on the microstructural evolution and densification process of AZO targets;Ceramics International;2022-06
2. The preparation of high-density aluminum-doped zinc oxide ceramics by cold sintering process;Journal of Alloys and Compounds;2020-08
3. Fabrication of Fine-Grained Functional Ceramics by Two-Step Sintering or Spark Plasma Sintering (SPS);Design and Manufacturing;2020-07-29
4. Sol-Jel Yöntemiyle IGZO Partiküllerin Üretimi, Peletlenmesi ve Karakterizasyonu;Journal of Polytechnic;2020-05-22
5. Study on powder preparation of IGZO target and its effect on sintering;Journal of Alloys and Compounds;2019-09
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